An algorithm for the calculation of heavy ion ranges in SiO2

Kabadayı Ö., Gümüş H.

Nukleonika, vol.48, no.3, pp.145-149, 2003 (SCI-Expanded) identifier

  • Publication Type: Article / Article
  • Volume: 48 Issue: 3
  • Publication Date: 2003
  • Journal Name: Nukleonika
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.145-149
  • Keywords: Ion implantation, Ion range, SiO2
  • Ondokuz Mayıs University Affiliated: Yes


The heavy ion ranges in amorphous SiO2 have been calculated by using a technique based on solution of first order ODE's. Br, Au, Hg, Bi, projectiles have been chosen as incident ion. Since the target is assumed to be amorphous, Bragg's rule can be used to calculate electronic and nuclear stopping powers in the compound. Numerical solutions have been performed by using Fehlberg fourth-fifth order Runge-Kutta method. The results are compared with experimental data, as well as with the result of the Monte Carlo program SRIM and other standard procedures such as PRAL and WS [19]. It is found that the agreement between our method and the experiment is good and within 10%.