NaCa2SiO4F was used as a Na and F standard for electron microprobe analysis (EMPA) and analytical electron microscopy (AEM) analysis. Usually, high amounts of Na- and/or F-containing materials vaporise under the electron beam, and therefore constants for these elements cannot be calculated correctly. Vaporization of NaCa2SiO4F under the electron beam is not strong and its composition does not change significantly. The material does not absorb water easily, can be prepared homogeneously and the crystals are suitable for both EMPA and AEM. The material is not electrically conductive at the ambient temperature. A conductive carbon coating is applied.